In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK
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In-line characterization, yield, reliability, and failure analysis in microelectronic manufacturing II : 31 May-1 June 2001, Edinburgh, UK
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4406)
SPIE, c2001
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Includes bibliographic references and author index