MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

著者

• Behringer, Uwe F. W.
• Uttamchandani, Deepak
• Society of Photo-optical Instrumentation Engineers
• Scottish Enterprise
• European Optical Society
• Institution of Electrical Engineers

書誌事項

MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK

Uwe F. W. Behringer, Deepak G. Uttamchandani, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering ; cosponsored by Scottish Enterprise (UK) ; cooperating organizations, EOS--European Optical Society [and] IEE--the Institution of Electrical Engineers (UK)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4407）

SPIE, c2001

注記

Includes bibliographical references and index

• NII書誌ID(NCID): BA61061749
• ISBN:
  • 0819441082
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 442 p.
• 大きさ: 28 cm
• 件名:
  • LCSH : Microelectromechanical systems -- Design and construction -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Microelectronic packaging -- Congresses
  • LCSH : Mechatronics -- Congresses
• 親書誌ID:
  • BA0022700X