MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
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MEMS design, fabrication, characterization, and packaging : 30 May-1 June 2001, Edinburgh, UK
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 4407)
SPIE, c2001
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Includes bibliographical references and index