Micro-electro-mechanical systems (MEMS) 2001 : presented at 2000[2001] International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York
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Micro-electro-mechanical systems (MEMS) 2001 : presented at 2000[2001] International Mechanical Engineering Congress and Exposition, November 11-16, 2001, New York, New York
(MEMS, vol. 3)
American Society of Mechanical Engineers, c2001
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Includes bibliograpical references and index