Interaction of ions with condensed matter

著者

    • Galdikas, A. (Arvaidas)
    • Prani︠a︡vichi︠u︡s, L. (Li︠u︡dvikas)

書誌事項

Interaction of ions with condensed matter

A. Galdikas and L. Praneviéus [i.e. Pranevieius]

（Horizons in world physics, v. 229）

Nova Science, c2000

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注記

Includes bibliographical references (p. [167]-174) and index

内容説明・目次

内容説明

Interactions of Ions with Condensed Matter, Volume 229

目次

  • Contents: Sputtering of Monoelemental Solids -- Ion Energy Losses
  • Collision Cascades
  • Physical Sputtering. Sputtering of Multielement Solids -- Preferential Sputtering
  • Modelling of Preferential Sputtering. Formation of the Altered Layer -- Collisional Mixing
  • Modelling of Collisional Mixing
  • Thermal Diffusion
  • Radiation Enhanced Diffusion
  • Radiation Enhanced Diffusion and Sputtering
  • Preferential Sputtering and Interdiffusion
  • Radiation Activated Temperature Gradient Diffusion
  • Segregation. Surface Topography -- Development of Surface Roughness
  • Roughening Effects on Ion Beam Profiling of Multilayers
  • Modelling of Sputtering of Multilayers. Heterogeneous Processes in Reactive Plasma -- Plasmochemical Etching
  • Model of Etching Kinetics
  • Etching Profiles
  • Modelling of Etching Through a Mask.

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