Proceedings, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003

著者

• IEEE Robotics and Automation Society
• IEEE Annual International Conference on Micro Electro Mechanical Systems

書誌事項

Proceedings, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003

sponsored by IEEE and the Robotics and Automation Society

IEEE Operations Center, c2003

タイトル別名

MEMS-03 Kyoto

MEMS-2003

注記

"IEEE catalog number: 03CH37426"

Includes bibliographical references

• NII書誌ID(NCID): BA61339878
• ISBN:
  • 0780377443
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, N.J.
• ページ数/冊数: xxxiv, 711 p.
• 大きさ: 30 cm.
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses