High purity silicon VII : proceedings of the international symposium

著者

• International Symposium on High Purity Silicon
• Claeys, C. L.
• Electrochemical Society. Electronics Division
• Society of Photo-optical Instrumentation Engineers
• Electrochemical Society. Meeting

書誌事項

High purity silicon VII : proceedings of the international symposium

editors C.L. Claeys ... [et al.] ; sponsoring division: Electronics

（Proceedings / [Electrochemical Society], v. 2002-20）

Electrochemical Society, c2002

注記

"... held in Salt Lake City, Utah at the 202nd Meeting of the Electrochemical Society, October 20-25, 2002"--on pref

Includes bibliographical references and indexes

• NII書誌ID(NCID): BA61764589
• ISBN:
  • 156677344X
• LCCN: 2002116856
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: xiii, 406 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290