Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA

Author(s)

• Society of Photo-optical Instrumentation Engineers
• Gu, Zu-Han
• Maradudin, A. A.

Bibliographic Information

Surface scattering and diffraction for advanced metrology II : 9 July 2002 Seattle, Washington, USA

Zu-Han Gu, Alexei A. Maradudin, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations the Boeing Company (USA) ... [et al.]

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 4780）

SPIE, c2002

Note

Includes index

Details

• NCID: BA6196980X
• ISBN:
  • 0819445479
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 186 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X