Gettering and deffect engineering in semiconductor technology : GADEST '99 : proceedings of the 8th International Autumn Meeting : Höör, Schweden, September 25-28 1999

Author(s)

• International Autumn Meeting, Gettering and Defect Engineering in Semiconductor Technology
• Grimmeiss, H.G.
• Ask, L.
• Kleverman, M.
• Kittler, M.
• Richter, H.

Bibliographic Information

Gettering and deffect engineering in semiconductor technology : GADEST '99 : proceedings of the 8th International Autumn Meeting : Höör, Schweden, September 25-28 1999

editors, H.G. Grimmeiss, L.Ask, M.Kleverman, M.Kittler and H.Richter

（Diffusion and defect data : solid state data, Pt. B . Solid state phenomena ; v. 69 - 70）

Scitec Publications, c1999

Details

• NCID: BA62025401
• Country Code: sz
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Switzerland
• Pages/Volumes: 610 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA07841800