Silicon processing for the VLSI era

Author(s)

• Wolf, Stanley
• Tauber, Richard N.

Bibliographic Information

Silicon processing for the VLSI era

Stanley Wolf, Richard N. Tauber

Lattice Press, c2000

2nd ed

• v. 1

Note

vol. 1: Process technology

Includes bibliographies and indexes

Details

• NCID: BA62052368
• ISBN:
  • 0961672161
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Sunset Beach, Calif.
• Pages/Volumes: v.
• Size: 25 cm
• Classification:
  • NDC8 : 549.7
  • LCC : TK7874
  • DC19 : 621.381/73
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Silicon