Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

Author(s)

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Electrochemical Society. Meeting
• Sah, Ram Ekwal
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics

（Proceedings / [Electrochemical Society], v. 2003-2）

Electrochemical Society, c2003

Note

"... held April 28-May 2, 2003 in Paris as a part of the 203rd Meeting of the Electrochemical Society (ECS)"--on pref

Includes bibliographical references and indexes

Details

• NCID: BA62538381
• ISBN:
  • 1566773474
• LCCN: 2003100710
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: xii, 636 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290