Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

著者

• Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
• Electrochemical Society. Meeting
• Sah, Ram Ekwal
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Silicon nitride and silicon dioxide thin insulating films VII : proceedings of the international symposium

editors, R.E. Sah ... [et al.] ; sponsoring divisions, Dielecric Scoeice and Technology, Electronics

（Proceedings / [Electrochemical Society], v. 2003-2）

Electrochemical Society, c2003

注記

"... held April 28-May 2, 2003 in Paris as a part of the 203rd Meeting of the Electrochemical Society (ECS)"--on pref

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA62538381
• ISBN:
  • 1566773474
• LCCN: 2003100710
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: xii, 636 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290