Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

著者

• ALTECH
• Electrochemical Society. Meeting
• Kolbesen, Bernd O.
• Electrochemical Society. Electronics Division

書誌事項

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

editors, Bernd O. Kolbesen ... [et al.] ; sponsored by the Electrochemical Society. Electronics Division

（Proceedings / [Electrochemical Society], v. 2003-3）

Electrochemical Society, c2003

• SPIE

注記

"SPIE Volume 5133" --on T.p. verso

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA62545478
• ISBN:
  • 1566773482
  • 0819449997
• LCCN: 2003100709
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xii, 556 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290