Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

Author(s)

• ALTECH
• Electrochemical Society. Meeting
• Kolbesen, Bernd O.
• Electrochemical Society. Electronics Division

Bibliographic Information

Analytical and diagnostic techniques for semiconductor materials, devices, and processes : joint proceedings of the symposia on: ALTECH 2003, Analytical Techniques for Semiconductor Materials and Process Characterization IV, Paris, France and the 202nd Meeting of the Electrochemical Society, Diagnostic Techniques for Semiconductor Materials and Devices VI, Salt Lake City, Utah

editors, Bernd O. Kolbesen ... [et al.] ; sponsored by the Electrochemical Society. Electronics Division

（Proceedings / [Electrochemical Society], v. 2003-3）

Electrochemical Society, c2003

• SPIE

Note

"SPIE Volume 5133" --on T.p. verso

Includes bibliographical references and indexes

• NCID: BA62545478
• ISBN:
  • 1566773482
  • 0819449997
• LCCN: 2003100709
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xii, 556 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290