2003 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings, 31 March-1 April, 2003, Munich, Germany
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2003 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science of semiconductor manufacturing excellence" : ASMC 2003 proceedings, 31 March-1 April, 2003, Munich, Germany
IEEE Service Center, c2003
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ASMC 2003 proceedings, 14th annual Advanced Semiconductor Manufacturing Conference and Workshop
03CH37406
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Includes bibliographical references
"IEEE catalog number 03CH37406"--on cover