Micromachines as tools for nanotechnology

Author(s)

• 藤田, 博之 フジタ, ヒロユキ

Bibliographic Information

Micromachines as tools for nanotechnology

H. Fujita (Ed.)

（Microtechnology and MEMS）

Springer, c2003

Note

Includes bibliographical references

Details

• NCID: BA63431419
• ISBN:
  • 354000856X
• LCCN: 2003045497
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin
• Pages/Volumes: xii, 211 p.
• Size: 25 cm
• Classification:
  • LCC : T174.7
  • DC21 : 620/.5
• Subject Headings:
  • LCSH : Nanotechnology
  • LCSH : Microelectromechanical systems
• Parent Bibliography ID:
  • BA51409718