Fundamentals of semiconductor fabrication

Author(s)

• May, Gary S.
• Sze, S. M.

Bibliographic Information

Fundamentals of semiconductor fabrication

Gary S. May, Simon M. Sze

Wiley, c2004

International ed

Note

Includes bibliographical references and index

Details

• NCID: BA63893786
• ISBN:
  • 0471452386
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Hoboken
• Pages/Volumes: xiii, 305 p.
• Size: 26 cm
• Classification:
  • DC21 : 621.38152
• Subject Headings:
  • LCSH : Semiconductors -- Design and construction