Modelling of microfabrication systems
著者
書誌事項
Modelling of microfabrication systems
（Microtechnology and MEMS）
Springer, c2003
大学図書館所蔵 全5件
注記
Includes bibliographical references (p. [249]-261) and index
内容説明・目次
内容説明
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
目次
1 Ion Beam.- 2 X-ray Lithography.- 3 Laser Chemical Vapor Deposition.- 4 Laser Photopolymerization.- 5 Laser Ablation.- 6 Thin Films.- References.
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