Modelling of microfabrication systems
Author(s)
Bibliographic Information
Modelling of microfabrication systems
（Microtechnology and MEMS）
Springer, c2003
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Note
Includes bibliographical references (p. [249]-261) and index
Description and Table of Contents
Description
This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
Table of Contents
1 Ion Beam.- 2 X-ray Lithography.- 3 Laser Chemical Vapor Deposition.- 4 Laser Photopolymerization.- 5 Laser Ablation.- 6 Thin Films.- References.
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