Surface scattering and diffraction III : 4-6 August 2003, San Diego, California, USA
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Bibliographic Information
Surface scattering and diffraction III : 4-6 August 2003, San Diego, California, USA
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 5189)
SPIE, c2003
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Includes bibliographies and index
Description and Table of Contents
Description
Previous symposia entitled: Surface scattering and diffraction for advanced metrology.
by "Nielsen BookData"