Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003

著者

• International Conference on Characterization and Metrology for ULSI Technology
• Seiler, David G.
• Diebold, A. C. (Alain C.)
• Shaffner, Thomas J.
• McDonald, Robert
• Zollner, Stefan
• Khosla, Rajinder P.
• Secula, Erik M.

書誌事項

Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003

editors David G. Seiler ... [et al.]

（AIP conference proceedings, 683）

American Institute of Physics, c2003

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA65067689
• ISBN:
  • 0735401527
• LCCN: 2003111108
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Melville, New York
• ページ数/冊数: xviii, 818 p.
• 大きさ: 28 cm.
• 付属資料: 1 computer laser optical disk (4 3/4 in.)
• 親書誌ID:
  • BA00284604