Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003

Author(s)

• International Conference on Characterization and Metrology for ULSI Technology
• Seiler, David G.
• Diebold, A. C. (Alain C.)
• Shaffner, Thomas J.
• McDonald, Robert
• Zollner, Stefan
• Khosla, Rajinder P.
• Secula, Erik M.

Bibliographic Information

Characterization and metrology for ULSI technology : 2003 international conference on characterization and metrology for ULSI technology, Austin, Texas 24-28 March 2003

editors David G. Seiler ... [et al.]

（AIP conference proceedings, 683）

American Institute of Physics, c2003

Note

Includes bibliographical references and index

Details

• NCID: BA65067689
• ISBN:
  • 0735401527
• LCCN: 2003111108
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Melville, New York
• Pages/Volumes: xviii, 818 p.
• Size: 28 cm.
• Attached Material: 1 computer laser optical disk (4 3/4 in.)
• Parent Bibliography ID:
  • BA00284604