Laser crystallization of silicon

著者

• Nickel, Norbert H.

書誌事項

Laser crystallization of silicon

[editor], Norbert H. Nickel

（Semiconductors and semimetals, v. 75）

Elsevier Academic Press, 2003

1st ed

注記

Includes bibliographical references and index

内容説明・目次

内容説明

This book on the Laser Crystallization of Silicon reviews the latest experimental and theoretical studies in the field. It has been written by recognised global authorities and covers the most recent phenomena related to the laser crystallization process and the properties of the resulting polycrystalline silicon. Reflecting the truly interdisciplinary nature of the field that the series covers, this volume will continue to be of great interest to physicists, chemists, materials scientists and device engineers in modern industry.

目次

• Preface
• introduction to laser crystallization of silicon
• heat transfer and phase transformations in laser melting and recrystallization of amorphous thin si films
• modelling laser-induced phase change processes: theory and computation
• laser interference crystallization of amorphous films
• structural and electronic properties of laser crystallized poly-si.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA65087438
• ISBN:
  • 0127521844
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam ; San Diego, Calif.
• ページ数/冊数: xi, 201 p.
• 大きさ: 25 cm
• 件名:
  • LCSH : Silicon
• 親書誌ID:
  • BA00240449