Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

Author(s)

• Boning, Duane S.
• Devriendt, Katia
• Oliver, Michael R.
• Stein, David J.

Bibliographic Information

Chemical-mechanical planarization : symposium held April 22-24, 2003, San Francisco, California, U.S.A.

editors, Duane S. Boning ... [et al.]

（Materials Research Society symposium proceedings, v. 767）

Materials Research Society, c2003

Note

Includes bibliographical references and indexes

Details

• NCID: BA65410307
• ISBN:
  • 1558997040
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale, Pa.
• Pages/Volumes: xi, 348 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775