Fundamental electron interactions with plasma processing gases

Author(s)

• Christophorou, L. G.
• Olthoff, James Kenneth

Bibliographic Information

Fundamental electron interactions with plasma processing gases

Loucas G. Christophorou and James K. Olthoff

（Physics of atoms and molecules）

Kluwer Academic/Plenum Publishers, c2004

Note

Includes bibliographical references and index

Details

• NCID: BA65557815
• ISBN:
  • 0306480379
• LCCN: 2003064029
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xii, 776 p.
• Size: 26 cm
• Classification:
  • LCC : QC794.6.C6
  • DC22 : 539.7/57
• Subject Headings:
  • LCSH : Electron-molecule collisions
  • LCSH : Plasma (Ionized gases)
• Parent Bibliography ID:
  • BA00058580