TY - BOOK AU - Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics AU - Materials Research Society AU - McKerrow, Andrew J. AU - Leu, Jihperng (Jim) AU - Kraft, Oliver AU - Kikkawa, Takamaro TI - Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics-2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A. PB - Materials Research Society PY - 2003 T2 - Materials Research Society symposium proceedings VL - v. 766 EP - xv, 515 p. UR - https://ci.nii.ac.jp/ncid/BA65639421 SN - 1558997032 ER -