Technical digest of the 16th International Vacuum Microelectronics Conference : IVMC 2003, July 7-11, 2003, Senri Life Science Center, Toyonaka, Osaka, Japan

Author(s)

Bibliographic Information

Technical digest of the 16th International Vacuum Microelectronics Conference : IVMC 2003, July 7-11, 2003, Senri Life Science Center, Toyonaka, Osaka, Japan

editors, Mikio Takai, Yasuhito Gotoh, Junzo Ishikawa

[IEEE], c2003

Other Title

03TH8703

IVMC-2003

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Note

"IEEE catalog number: 03TH8703"--T.p. verso

Includes bibliographical references and index

Details

  • NCID
    BA66973804
  • ISBN
    • 4818195154
  • Country Code
    us
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    [Piscataway, N.J.]
  • Pages/Volumes
    xx, 314 p.
  • Size
    30 cm
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