2003 International Semiconductor Conference : 26th edition, September 28-October 2, 2003, Sinaia, Romania : CAS 2003 proceedings, plenary session, nanoscience and nanoengineering, micromachined devices and circuits for microwave and millimeter wave applications, microoptics and microphotonics, sensors and MEMS
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2003 International Semiconductor Conference : 26th edition, September 28-October 2, 2003, Sinaia, Romania : CAS 2003 proceedings, plenary session, nanoscience and nanoengineering, micromachined devices and circuits for microwave and millimeter wave applications, microoptics and microphotonics, sensors and MEMS
IEEE Operations Center, c2001 [i.e. c2003]
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03TH8676
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Includes bibliographical references
"IEEE catalog number: 03TH8676" -- T. p.