Nano-plating : microstructure control theory of plated film and data base of plated film microstructure

著者

書誌事項

Nano-plating : microstructure control theory of plated film and data base of plated film microstructure

Tohru Watanabe

Elsevier, 2004

タイトル別名

Fine plating : microstructure control and analysis methods for plated films

大学図書館所蔵 件 / 全4件

この図書・雑誌をさがす

注記

Includes bibliographical references and index

Originally published in Japanese by Technical Information Association in February 2003--p. ix

内容説明・目次

内容説明

Modern plating technology is highly advanced, and has developed to cover a wide range of applications. In addition to the traditional use for surface finishing, plating technology can now offer novel processes to fabricate high-performance films or fine microstructural bodies in the microelectronics industry. This rapid progress reflects the potential for the electroplating plating method to become one of today's leading-edge technologies. This book will introduce a concept of a Microstructure Control Theory for plated films, describe and discuss various experimental results that support the theory, and finally, present a collection of experimental data on 53 types of plated metal/alloy systems with a special emphasis on their microstructure.The unique feature of this database is that most of the plating baths are simple and contain no additives. In addition, amorphous materials were used as substrates to avoid the effects of substrate structure, and single-crystal substrates were chosen to study the epitaxial growth phenomenon.

目次

  • Fine Plating, Microstructure Control and Measurements for Plated Films
  • Research Process of Plating Technology
  • Review of Previous TMC and Practical Plated Films
  • Theory of Microstructure Control For Plated Films
  • Film Formation Mechanism In Electrodeposition
  • Plating In Organic Electrolyte
  • Experimental Methods
  • Selection of Plating Electrolyte
  • Cobalt Deposition from various Organic Solvent Solutions
  • Formation of Electrolytic Films
  • Electroless Films
  • Microstructural Changes in Plated Films during Heat Treatment
  • A Change of Meta-Stable and Non-Equilibrium Phases to Stable Crystals
  • Transformation of Amorphous Phase to Equilibrium Phase
  • Macrostructure Control in Plated Films
  • Fabrication of 3-D Microstructural Body
  • Characterization Methods for Plated Films
  • Structure of Metal Substrates
  • Structural Determination of Plated Films
  • Grain Size Measurements
  • Observations of Surface Morphology
  • Measurement of Preferred Orientation
  • Plating Methods
  • Microstructure Observations and Measurements Methods For Plated Films
  • Data Base on the Microstructure of Plated Films

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