Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA

Author(s)

• Khounsary, Ali M.
• Dinger, Udo
• Ota, Kazuya

Bibliographic Information

Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA

Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5193）

SPIE, c2004

Details

• NCID: BA67810543
• ISBN:
  • 0819450669
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: ix, 222 p.
• Size: 28 cm
• Parent Bibliography ID:
  • BA0022700X