Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA

著者

• Khounsary, Ali M.
• Dinger, Udo
• Ota, Kazuya

書誌事項

Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA

Ali M. Khounsary, Udo Dinger, Kazuya Ota, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 5193）

SPIE, c2004

詳細情報

• NII書誌ID(NCID): BA67810543
• ISBN:
  • 0819450669
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: ix, 222 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X