Microscopy of semiconducting materials 2003 : proceedings of the Institute of Physics Conference, Cambridge University, 31 March - 3 April 2003

著者

• Cullis, A. G.
• Midgley, P. A.

書誌事項

Microscopy of semiconducting materials 2003 : proceedings of the Institute of Physics Conference, Cambridge University, 31 March - 3 April 2003

edited by A.G. Cullis and P.A. Midgley

（Institute of Physics conference series, no. 180）

Institute of Physics Publishing, c2003

注記

"SMM XIII"

Includes bibliographical references and indexes

内容説明・目次

内容説明

Modern electronic devices rely on ever-greater miniaturization of components, and semiconductor processing is approaching the domain of nanotechnology. Studies of devices in this regime can only be carried out with the most advanced forms of microscopy. Accordingly, Microscopy of Semiconducting Materials focuses on international developments in semiconductor studies carried out by all forms of microscopy. It provides an overview of the latest instrumentation, analysis techniques, and state-of-the-art advances in semiconducting materials science for solid state physicists, chemists, and material scientists.

目次

Preface High Resolution Microscopy and Microanalysis Self-Organised and Quantum Domain Structures Epitaxy - Growth Phenomena Epitaxy - Wide Band-Gap Nitrides Processed Silicon and Other Device Materials Metalliztion, Silicides and Contacts Device Studies Scanning Electron and Ion Advances Scanning Probe Microscopy Indices

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA67904498
• ISBN:
  • 0750309792
• 出版国コード: uk
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bristol
• ページ数/冊数: xviii, 686 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA00171324