Energy-dispersive X-ray analysis in the electron microscope
著者
書誌事項
Energy-dispersive X-ray analysis in the electron microscope
（Microscopy handbooks, 49）
BIOS, 2003
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注記
Includes bibliographical references (p. 135-137) and index
内容説明・目次
内容説明
This book provides an in-depth description of x-ray microanalysis in the electron microscope. It is sufficiently detailed to ensure that novices will understand the nuances of high-quality EDX analysis. Includes information about hardware design as well as the physics of x-ray generation, absorption and detection, and most post-detection data processing. Details on electron optics and electron probe formation allow the novice to make sensible adjustments to the electron microscope in order to set up a system which optimises analysis. It also helps the reader determine which microanalytical method is more suitable for their planned application.
目次
Ch 1. HISTORY. Ch 2. PRINCIPLES. What are X-rays?. Ionization cross-section. Fluorescence yield. X-ray absorption. Insulators, conductors and semiconductors. Ch 3. THE ENERGY-DISPERSIVE X-RAY DETECTOR. Introduction.The semiconductor X-ray detector. The X-ray analyser. Details of the spectrum. New detector technologies. Ch 4. SPECTRAL PROCESSING. Introduction. Background stripping. Background modelling. Deconvolution of overlapping peaks. Statistical considerations. The impact of statistics. The effect of the background. Analytical strategy. Ch 5. ENERGY-DISPERSIVE X-RAY MICROANALYSIS IN THE SCANNING ELECTRON MICROSCOPE. Introduction. Fundamentals of X-ray analysis in the SEM. Quantitative microanalysis in the SEM. Semi-quantitative microanalysis in the SEM. EDX analysis in the VP-SEM and ESEM. Inhomogeneous samples. Concluding remarks. Ch 6. X-RAY MICROANALYSIS IN THE TRANSMISSION ELECTRON MICROSCOPE. Introduction. Principles of quantitative analysis in the TEM. Absorption, fluorescence and other sources of error. Spatial resolution. Microscope considerations. Ch 7. X-RAY MAPPING. Introduction. Hardware implementation. Statistical considerations. Other applications. Concluding comments. Ch 8. ENERGY-DISPERSIVE X-RAY ANALYSIS COMPARED WITH OTHER TECHNIQUES. Introduction. Wavelength-dispersive X-ray analysis - electron probe microanalysis (EPMA). Electron energy-loss spectroscopy (EELS). Auger electron spectroscopy (AES). X-ray photoelectron spectroscopy (XPS). X-ray fluorescence (XRF). Atom probe. Overall strengths and weaknesses.
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