Thin film materials technology : sputtering of compound materials

Author(s)

• 和佐, 清孝 ワサ, キヨタカ
• 北畠, 真 キタバタケ, マコト
• 足立, 秀明 アダチ, ヒデアキ

Bibliographic Information

Thin film materials technology : sputtering of compound materials

by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi

William Andrew Pub., c2004 , Springer

• : William Andrew
• : Springer

Note

Includes bibliographical references and index

Details

• NCID: BA68437332
• ISBN:
  • 0815514832
  • 3540211187
• LCCN: 2003018016
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Norwich, N.Y.,Heidelberg
• Pages/Volumes: xiv, 518 p.
• Size: 24 cm.
• Classification:
  • LCC : TS695
  • DC22 : 621.3815/2
• Subject Headings:
  • LCSH : Cathode sputtering (Plating process)
  • LCSH : Thin films