Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

Author(s)

• Carter, R. J.

Bibliographic Information

Materials, technology and reliability for advanced interconnects and low-k dielectrics - 2004 : symposium held April 13-15, 2004, San Francisco, California, U.S.A.

editors, R.J. Carter ... [et al.]

（Materials Research Society symposium proceedings, v. 812）

Materials Research Society, c2004

Note

Includes bibliographical references and indexes

Details

• NCID: BA69047763
• ISBN:
  • 1558997628
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Warrendale
• Pages/Volumes: xiii, 402 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA00013775