OSA proceedings on soft X-ray projection lithography : proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

著者

• Hawryluck, Andrew M.
• Stulen, Richard H.
• Topical Meeting

書誌事項

OSA proceedings on soft X-ray projection lithography : proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

edited by Andrew M. Hawryluk and Richard H. Stulen ; sponsored by the Optical Society of America

Optical Society of America, c1993

タイトル別名

Soft X-ray projection lithography

注記

"Volume 18"

"Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy" -- On T.p.

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA69212010
• ISBN:
  • 1557523045
• LCCN: 92062915
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Washington, D.C.
• ページ数/冊数: x, 226 p.
• 大きさ: 29 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.3815/31
• 件名:
  • LCSH : X-ray lithography -- Congresses