OSA proceedings on soft X-ray projection lithography : proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

Author(s)

• Hawryluck, Andrew M.
• Stulen, Richard H.
• Topical Meeting

Bibliographic Information

OSA proceedings on soft X-ray projection lithography : proceedings of the Topical Meeting, May 10-12, 1993, Monterey, California

edited by Andrew M. Hawryluk and Richard H. Stulen ; sponsored by the Optical Society of America

Optical Society of America, c1993

Other Title

Soft X-ray projection lithography

Note

"Volume 18"

"Supported by Air Force Office of Scientific Research, Defense Advance Research Projects Agency, Department of Energy" -- On T.p.

Includes bibliographical references and index

Details

• NCID: BA69212010
• ISBN:
  • 1557523045
• LCCN: 92062915
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington, D.C.
• Pages/Volumes: x, 226 p.
• Size: 29 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.3815/31
• Subject Headings:
  • LCSH : X-ray lithography -- Congresses