Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

Author(s)

• Roozeboom, Fred
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. High Temperature Materials Division

Bibliographic Information

Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium

editors, F. Roozeboom ... [et al.]

（Proceedings / [Electrochemical Society], v. 2003-14, 2004-01）

Electrochemical Society, c2003-2004

• [I]
• II

Note

Includes bibliographical references and indexes

Details

• NCID: BA69491300
• ISBN:
  • 1566773962
  • 1566774063
• LCCN: 2003110354
• LCCN: 2004102296
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: 2 v.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290