Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues

著者

• International Symposium on High Dielectric Constant Materials: Materials Science, Processing, and Reliability, and Manufacturing Issues
• Kar, Samares
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Physicas and technology of high-k gate dielectrics : proceedings of the International Symposium on High Dielectric Constant Materials : Materials Science, Processing, and Reliability, and Manufacturing Issues

editors, S. Kar ... [et al.] ; sponsoring divisions: Dielectric Science and Technology, Electronics

（Proceedings / [Electrochemical Society], v. 2002-28, 2003-22）

Electrochemical Society, c2003-c2004

• [I]
• II

注記

1st: Held in Salt Lake City, Utah, October 20-24, 2004

2nd: Held in Orlando, Florida, October 12-17, 2003

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA69504479
• ISBN:
  • 1566773954
  • 1566774055
• LCCN: 2004100366
• LCCN: 2003109748
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: 2 v.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7872.D53
  • DC21 : 537/.24
• 件名:
  • LCSH : Dielectric devices -- Congresses
  • LCSH : Dielectrics -- Congresses
• 親書誌ID:
  • BA01323290