Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium

著者

• International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
• Rużyłło, Jerzy
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Cleaning technology in semiconductor device manufacturing VIII : proceedings of the international symposium

editors, J. Ruzyllo ... [et al.] ; sponsoring divisions: Electronics, Dielectric Science and Technology

（Proceedings / [Electrochemical Society], v. 2003-26）

Electrochemical Society, c2004

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA6950707X
• ISBN:
  • 156677411X
• LCCN: 2004101827
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xi, 436 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290