2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA

Author(s)

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
• Institute of Electrical and Electronics Engineers
• Semiconductor Equipment and Materials International

Bibliographic Information

2004 IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : "Advancing the science and technology of semiconductor manufacturing excellence" : ASMC 2004 proceedings, May 4-6, 2004, Boston, Massachusetts, USA

IEEE Operations Center, c2004

Other Title

ASMC 2004 proceedings, 15th annual Advanced Semiconductor Manufacturing Conference and Workshop

Note

Includes bibliographical references

"IEEE catalog number 04CH37530"--on cover

Details

• NCID: BA6951924X
• ISBN:
  • 0780383125
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, NJ
• Pages/Volumes: xi, 507 p.
• Size: 28 cm