Microprocesses and Nanotechnology '98 : digest of papers : 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyoungju, Korea

Author(s)

• International Microprocesses and Nanotechnology Conference
• 応用物理学会 オウヨウ ブツリ ガッカイ

Bibliographic Information

Microprocesses and Nanotechnology '98 : digest of papers : 1998 International Microprocesses and Nanotechnology Conference, July 13-16, 1998, Kyoungju, Korea

sponsored by the Japan Society of Applied Physics ... [et al.]

IEEE], c1998

• : softbound
• : microfiche

Note

IEEE Catalog Number and microfiche ISBN from label on verso of T.p

"IEEE Catalog Number 98EX135 ; JSAP Cat. No. 981223"--verso of T.p

Includes bibliographical references and author index

• NCID: BA70515552
• ISBN:
  • 4930813832
  • 0780344642
• LCCN: 99217176
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: [Piscataway, New Jersey
• Pages/Volumes: xxviii, 355 p.
• Size: 30 cm
• Classification:
  • LCC : QC176.8.M5
  • DC21 : 620.5
• Subject Headings:
  • LCSH : Microfabrication Congresses
  • LCSH : Nanotechnology Congresses