{"@context":{"owl":"http://www.w3.org/2002/07/owl#","bibo":"http://purl.org/ontology/bibo/","foaf":"http://xmlns.com/foaf/0.1/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/"},"@id":"https://ci.nii.ac.jp/ncid/BA71187594.json","@graph":[{"@id":"https://ci.nii.ac.jp/ncid/BA71187594#entity","@type":"bibo:Book","foaf:isPrimaryTopicOf":{"@id":"https://ci.nii.ac.jp/ncid/BA71187594.json"},"dc:title":[{"@value":"SIMOX"}],"dc:creator":"edited by Maria J. Anc","dc:publisher":[{"@value":"Institution of Electrical Engineers"}],"dcterms:extent":"xvi, 143 p.","cinii:size":"26 cm","dc:language":"eng","dc:date":"2004","cinii:ncid":"BA71187594","cinii:ownerCount":"2","foaf:maker":[{"@id":"https://ci.nii.ac.jp/author/DA14820636#entity","@type":"foaf:Person","foaf:name":[{"@value":"Anc, Maria J."}]}],"bibo:owner":[{"@id":"https://ci.nii.ac.jp/library/FA006678","@type":"foaf:Organization","foaf:name":"明治大学 図書館","rdfs:seeAlso":{"@id":"https://opac2018.lib.meiji.ac.jp/webopac/ufirdi.do?ufi_target=ctlsrh&ncid=BA71187594"}},{"@id":"https://ci.nii.ac.jp/library/FA020056","@type":"foaf:Organization","foaf:name":"秋田県立大学 附属図書館 本荘キャンパス図書館"}],"prism:publicationDate":["c2004"],"cinii:note":["Includes bibliographical references and index"],"dc:subject":["DC22:621.31937"],"foaf:topic":[{"@id":"https://ci.nii.ac.jp/books/search?q=Silicon-on-insulator+technology","dc:title":"Silicon-on-insulator technology"}],"dcterms:isPartOf":[{"@id":"https://ci.nii.ac.jp/ncid/BA71187561#entity","dc:title":"Processing series, no. 4","@type":"bibo:Book"}],"dcterms:hasPart":[{"@id":"urn:isbn:086341334X"}]}]}