CMOS-MEMS
著者
書誌事項
CMOS-MEMS
（Advanced micro & nanosystems, v. 2）
Wiley-VCH, c2005
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
目次
Preface. Foreword. List of Contributors. 1 Fabrication Technology (O. Brand). 2 Material Characterization (J. O. Paul and P. Ruther). 3 Monolithically Integrated Inertial Sensors (G. K. Fedder, J. Chae, H. Kulah, K. Najafi, T. Denison, J. Kuang, and S. Lewis). 4 CMOS-MEMS Acoustic Devices (J. J. Neumann and K. J. Gabriel). 5 RF CMOS MEMS (T. Mukherjee and G. K. Fedder). 6 CMOS-based Pressure Sensors (H.-J. Timme). 7 CMOS-based Chemical Sensors (A. Hierlemann). 8 Biometric Capacitive CMOS Fingerprint Sensor Systems (C. Hierold, G. Hribernig, and T. Scheiter). 9 CMOS-based Biochemical Sensing Systems (J. Lichtenberg, H. Baltes). 10 CMOS-based Thermal Sensors (T. Akin). 11 Circuit and System Integration (C. Hagleitner and K.-U. Kirstein). Subject Index.
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