Semiconductor manufacturing handbook

Author(s)

• Geng, Hwaiyu

Bibliographic Information

Semiconductor manufacturing handbook

Hwaiyu Geng, editor in chief

（McGraw-Hill handbooks）

McGraw-Hill, c2005

Note

Includes bibliographical references and index

Details

• NCID: BA71921945
• ISBN:
  • 0071445595
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York, N.Y.
• Pages/Volumes: 1 v. (various pagings)
• Size: 25 cm
• Parent Bibliography ID:
  • BA00279375