Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

著者

• International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS)
• Heyns, Marc
• Mertens, Paul
• Meuris, Marc

書誌事項

Ultra clean processing of silicon surfaces 2000 : proceedings of the Fifth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS 2000), held in Ostend, Belgium, September 18-20, 2000

editors, Marc Heyns, Paul Mertens and Marc Meuris

（Diffusion and defect data : solid state data, pt. B . Solid state phenomena ; v. 76-77）

Scitec Publications, c2001

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA7192768X
• ISBN:
  • 3908450578
• 出版国コード: sz
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Uetikon-Zuerich
• ページ数/冊数: xiii, 321 p.
• 大きさ: 25 cm
• 親書誌ID:
  • BA07841800