Microchip fabrication : a practical guide to semiconductor processing

著者

書誌事項

Microchip fabrication : a practical guide to semiconductor processing

Peter Van Zant

McGraw-Hill, c2004

5th ed

大学図書館所蔵 件 / 全2件

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

New to this edition is: nanotechnology; 300-mm wafer processing; "Green" processes and devices; and new fabrication advances. This is the No.1 book in the industry - completely revised and updated. A perfect introduction to the industry that drives high tech, "Microchip Fabrication" offers a low-math, straight-talk approach to the entire process of semiconductor processing - from raw materials through shipping the finished, packaged device. With lots of detailed illustrations and analogies to everyday life, this is the industry's most novice-friendly text!Used for training, teaching, and vocational-technical programs, "Microchip Fabrication" covers every stage of semiconductor processing, from raw material preparation to packaging and testing and traditional and state-of-the-art processes. Each chapter contains quizzes and review summaries buttressed by an extensive glossary. By the time you've finished "Microchip Fabrication", you'll have a solid working knowledge of the important issues and processes and materials and methods involved in semiconductor technology, whether on the subatomic level or in the context of large-scale industrial practices. Review: "...An excellent reference for anyone who wishes to know more about the technical side of semiconductor manufacturing. It is well-indexed, and the chapters are self-contained enough to make it useful for catching up on one topic at a time." - FabTime, on the previous edition.

目次

The Semiconductor IndustryInternational Technology Roadmap for SemiconductorsSemiconductor Materials and Process ChemicalsManufacturing WafersOverview of Wafer Fabrication300mm wafer diameter processingContamination ControlProcess YieldsNanotechnology ProcessesOxidationBasic Patterning -- Surface Preparation to ExposureBasic Patterning -- Developing to Final InspectionAdvanced Photolithography ProcessesDopingDeposition of Dielectrics and Semiconductor LayersMetalization: Wiring the Chip CompositesProcess and Device EvaluationThe Business of Water FabricationGreen ProcessingSemiconductor Devices and Integrated Circuit FormationNanotechnology DevicesIntegrated Circuit TypesPackagingGLOSSARY

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