Handbook of ellipsometry
著者
書誌事項
Handbook of ellipsometry
W. Andrew Pub , Springer, c2005
- : W. Andrew
- : Springer
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注記
Includes bibliographical references and index
内容説明・目次
- 巻冊次
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: W. Andrew ISBN 9780815514992
内容説明
The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
目次
PART 1: THEORY OF ELLIPSOMETRYPolarized Light and EllipsometryOptical Physics of MaterialsData Analysis for Spectroscopic EllipsometryPART 2: INSTRUMENTATIONOptical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) EllipsometerRotating Polarizer and Analyzer EllipsometryPolarization Modulation EllipsometryMultichannel EllipsometryPART 3: APPLICATIONSSiO2 FilmsTheory and Application of Generalized EllipsometryPART 4: EMERGING AREASVUV EllipsometrySpectroscopic Infrared EllipsometryEllipsometry in Life SciencesIndex
- 巻冊次
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: Springer ISBN 9783540222934
内容説明
Ever progressive miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research are propelling ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, to greater popularity in a widening array of applications. Ellipsometry, without contact and non-damaging to samples, is an ideal measurement technique to determine optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications occurring today, this book provides a much needed foundation of the science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, fiber optics, biotechnology, and pharmaceuticals. Divided into four sections, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas.
目次
Polarized Light and Ellipsometry.- Optical Physics of Materials.- Data Analysis for Spectroscopic Ellipsometry.- Optical Components and the Simple PCSA (polarizer, compensator, sample, analyzer) Ellipsometer.- Rotating Polarizer and Analyzer Ellipsometry.- Polarization Modulation Ellipsometry.- Multichannel Ellipsometry.- SiO2 Films- Theory and Application of Generalized Ellipsometry.- VUV Ellipsometry.- Spectroscopic Infrared-Ellipsometry.- Ellipsometry in Life Sciences.
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