MEMS 2005 Miami : technical digest : 18th IEEE International Conference on Micro Electro Mechanical Systems : Miami Beach, Florida, USA, January 30-February 3, 2005

書誌事項

MEMS 2005 Miami : technical digest : 18th IEEE International Conference on Micro Electro Mechanical Systems : Miami Beach, Florida, USA, January 30-February 3, 2005

sponsored by IEEE and the Robotics and Automation Society

Institute of Electrical and Electronics Engineers, c2005

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注記

"IEEE catalog number: 05CH37610"--T.p. verso

Includes bibliographical references and indexes

詳細情報

  • NII書誌ID(NCID)
    BA72771484
  • ISBN
    • 0780387325
  • 出版国コード
    us
  • タイトル言語コード
    eng
  • 本文言語コード
    eng
  • 出版地
    [Piscataway N.J.]
  • ページ数/冊数
    xxxvii, 886 p.
  • 大きさ
    28 cm
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