MEMS 2005 Miami : technical digest : 18th IEEE International Conference on Micro Electro Mechanical Systems : Miami Beach, Florida, USA, January 30-February 3, 2005
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MEMS 2005 Miami : technical digest : 18th IEEE International Conference on Micro Electro Mechanical Systems : Miami Beach, Florida, USA, January 30-February 3, 2005
Institute of Electrical and Electronics Engineers, c2005
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"IEEE catalog number: 05CH37610"--T.p. verso
Includes bibliographical references and indexes