ARPA/NBS workshop I. measurement problems in integrated circuit processing and assembly

著者
    • Schafft, Harry A.
書誌事項

ARPA/NBS workshop I. measurement problems in integrated circuit processing and assembly

Harry A. Schafft

(NBS special publication, 400-3 . Semiconductor measurement technology)

U.S. G.P.O., 1974

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  • NBS special publication

    Planning Office, National Bureau of Standards, U.S. Dept. of Commerce , For sale by the Supt. of Docs., U.S. Govt. Print. Off

    426, Suppl. 1

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