ARPA/NBS workshop I. measurement problems in integrated circuit processing and assembly

Author(s)

    • Schafft, Harry A.

Bibliographic Information

ARPA/NBS workshop I. measurement problems in integrated circuit processing and assembly

Harry A. Schafft

(NBS special publication, 400-3 . Semiconductor measurement technology)

U.S. G.P.O., 1974

Available at  / 2 libraries

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    Planning Office, National Bureau of Standards, U.S. Dept. of Commerce , For sale by the Supt. of Docs., U.S. Govt. Print. Off

    426, Suppl. 1

    Available at 1 libraries

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