Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering

Author(s)

• Lyshevski, Sergey Edward

Bibliographic Information

Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering

Sergey Edward Lyshevski

（Nano- and microscience, engineering, technology and medicine series）

CRC Press, c2005

2nd ed

Note

Includes bibliographical references and index

Details

• NCID: BA73468186
• ISBN:
  • 0849328381
• LCCN: 2004057931
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boca Raton, Fla.
• Pages/Volumes: 722 p.
• Size: 27 cm
• Classification:
  • LCC : TK7875
  • DC22 : 621.381
• Subject Headings:
  • LCSH : Microelectromechanical systems
  • LCSH : Nanotechnology
• Parent Bibliography ID:
  • BA5182498X