Morphological evolution of electrodeposits -and- electrochemical processing in ULSI fabrication and electrodeposition of and on semiconductors IV : proceedings of the international symposia

Author(s)

• Electrochemical Society. Meeting
• Electrochemical Society. Electrodeposition Division
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Morphological evolution of electrodeposits -and- electrochemical processing in ULSI fabrication and electrodeposition of and on semiconductors IV : proceedings of the international symposia

editors, K. Kondo ... [et al.] ; sponsoring divisions, Electrodeposition, Dielectric Science and Technology, Electronics

（Proceedings / [Electrochemical Society], v. 2001-08）

Electrochemical Society, c2005

Note

"...were held during the 2001 Spring Meeting of the Electrochemical Soeity in Washington, D. C., the 198th meeting"--on pref.

Includes bibliographical references and indexes

Details

• NCID: BA73943199
• LCCN: 2004112427
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: ix, 406 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290